Polos ¿þÀÌÆÛ º£ÀÌÅ·¿ë 핫플레이트(Hotplate)       Spincoater Main

¿þÀÌÆÛ º£ÀÌÅ·(¼ÒÇÁÆ® º£ÀÌÅ·, Çϵ庣ÀÌÅ·)¿ë ÇÖÇÿ¡Æ® - ¶Ñ°ÏÀåÂø ¹× °ú ¸®ÇÁÆà ¾÷ ±â´É

 

Polos HP200AD Hotplatr for soft bake or hard bake ,


R&D와 Pilot Line용으로 적합


정확한 디지털 온도제어 1°C.
정밀한 온도제어가 필요한 PR의소프트베이크나 하드베이크 큐어링용으로 적합

사양:

  • Low surface temperature: gradient heating unit (safe housing temp);
  • Diagnostic serial interface (RS232);
  • Precision temperature controlling system: uniform temp.: +/- 0,5°C;
  • Digital temperature controller: adjustable in steps of 1°C;
  • Countdown timer (1-999 sec.) with acoustic alert.

Hot Plate with cover, POLOS-HP200AD

-Polos Precision Bake Plate
-¿Âµµ¹üÀ§:50-230C

Hot Plate POLOS-HP200AD
Polos Precision Bake Plate
-Temperature Range:50-230C
-Countdown timer:1-999sec with accoustic ¾Ë¸²
-Temperature Unioformity :+_1C
- Vacuum contact
- Lifting pins, automatic (set in 80mm diagonal only)
- Proximity pins (3x manual adjustment)
-Heater Surface Area: 220 x 220 mm
-È÷ÆÃÆÇ :Aluminium (anodised)
-Suitable for 1 x 200 mm wafer
-Power Max :1200w220 vac
--Heater block material :Aluminium (anodised)
-Housing Material : Stainless Steel
-Ä¡¼ö:450 x 320 x135 mm
-¶Ñ²± :stainless steel »óºÎ ¶Ñ°Ï ¿­¹æÁö¿ë Àý¿¬ÆÇ ÀåÂø
-The POLOS Hotplate is available for soft bake , hard bake

-°í¿Â¿¡¼­ ¾ÈÁ¤ÀûÀ¸·Î Hot Plate ¿Âµµ¸¦ Á¤¹Ð Á¦¾î °¡´É

 

- ¸®ÇÁÆà ÇÉ ÀåÂø , ÇÁ·Ï½ÃÇÉ ÀåÂø , º£Å¨ ÆÄÁö ±â´É , ÈùÁöµå Ä«¹ö.

 

 

-Polos hotplate HP200ad,

-500s hotplate for 500mm x 500mm area

-º°µµ »çÀÌÁî Á¦ÀÛ °¡´É

-Ä«Å»·Î±×

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»ó±â º£ÀÌÅ· °øÁ¤¿¡¼­ »ó±â Æ÷Åä·¹Áö½ºÆ® ³»¿¡ Æ÷ÇԵǾî ÀÖ´Â À¯±â¿ë¸Å, ¿¹¸¦ µé¾î ¼Öº¥Æ®°¡ Ǿ(fume)ÀÇ ÇüÅ·ΠÁ¦°ÅµÈ´Ù.
º£ÀÌÅ· °øÁ¤Àº ÀϹÝÀûÀ¸·Î ´ÙÀ½ÀÇ ³× ´Ü°è °øÁ¤À» Æ÷ÇÔÇÑ´Ù.

ù ¹ø°´Â Æ÷Åä·¹Áö½ºÆ®¸¦ ±âÆÇ »ó¿¡ µµÆ÷Çϱâ Àü¿¡ ±âÆÇÀ» ¼ÒÁ¤ÀÇ ¿Âµµ·Î °¡¿­ÇÏ¿© ±âÆÇ Ç¥¸éÀÇ À¯±â¹°À̳ª ¼öºÐÀ» Á¦°ÅÇÏ´Â ÇÁ¸® º£ÀÌÅ·(pre-baking) ´Ü°è.

µÎ ¹ø°´Â Æ÷Åä·¹Áö½ºÆ®¸¦ ±âÆÇ »ó¿¡ µµÆ÷ÇÑ Á÷ÈÄ¿¡ ÇàÇÏ´Â ¼ÒÇÁÆ® º£ÀÌÅ·(soft-baking) ´Ü°è.

¼¼ ¹ø°´Â Æ÷Åä·¹Áö½ºÆ®¸¦ ³ë±¤½ÃŲ ÈÄ¿¡ ÇàÇÏ´Â ³ë±¤ÈÄ º£ÀÌÅ·(post exposure -baking) ´Ü°è.

¸¶Áö¸· ³× ¹ø°´Â ³ë±¤ ÈÄ º¯ÇüµÈ Æ÷Åä·¹Áö½ºÆ®¸¦ Çö»ó(develop)ÇÑ ÈÄ¿¡ ÇàÇÏ´Â ÇÏµå º£ÀÌÅ·(hard-baking) ´Ü°èÀÌ´Ù.


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