¹Ì·¡Çü °í¼º´É ½ºÇÉÄÚÅÍ? |
---|
°í¼º´É , ´Ù±â´É, °íÁ¤¹Ð, °í½Å·Ú¼º ½ºÇÉÄÚÅÍ. |
¸ðµçÀÛ¾÷ À» ÄÜÆ®·Ñ °¡´ÉÇÑ ÅÍÄ¡½ºÅ©¸° ÆгΠmanufactured in Germany. |
---|
Polos ½ºÇÉÄ¿ÅÍ´Â R&D ¿ëÀ¸·Î Ưº°È÷ ¼³°èµÈ ½ºÇÉÄÚÅÍ ÀÔ´Ï´Ù. 4" ÇÁ·Î±×·¥¿ë µð½ºÇ÷¹ÀÌ¿¡¼ ¿©·¯ÀÛ¾÷À» ÄÜÆ®·Ñ °¡´ÉÇÕ´Ï´Ù. MEMS, Semi-may require mask cleaning, or a coating step conductor, PV, Microfluidics field, µîµî POLOS ½Ì±Û ¿þÀÌÆÛ ½ºÇÉÄÚÅʹ¼ö¸¹Àº ÀÀ¿ëÀÛ¾÷ÀÌ °¡´ÉÇÕ´Ï´Ù. cleaning, rinse/dry, coating, developing and etching. USB ¼ÒÄÏ ÀåÂø unlimited¸Þ¸ð¸® ¹× ½ºÅÜ ±â´É µ¶ÀÏÁ¦ µðÁöÅÐ ¼º¸¸ðÅÍ ÀåÂøÀ¸·Î ÃÖ°íÀÇ Á¤¹Ðµµ ¹× ½Å·Ú¼º ¿äÇÏ´Â ÀÛ¾÷ °¡´É. ¥á-crystalline NPP-H »ç¿ëÀ¸·Î ÀÏ¹Ý NPPº¸´Ù 100C¿¡¼ 2¹èÀÌ»óÀÇ °µµ ¹× ³»±¸¼º ,³»Ãæ°Ý¼ºº¸À¯. |
---|
½ºÇÉÄÚÅÍ Æ¯Â¡:°í¼Ó °¡¼Ó ±â´É :up to 0 - 12,000rpm in 0.3 sec. between speed and acceleration Without line break ÃÖ´ë °¡¼Óµµ :30,000rpm/sec ºÐ¸® °¡´ÉÇÑ ÅÍÄ¡½ºÅ©¸° ÄÜÆ®·Ñ ÆгΠ- ±Û·Îºê¹Ú½º (glove box)³» ¼³Ä¡½Ã À¯¸®. ȸÀü ¹× ¿ªÈ¸Àü ±â´É:¡°puddle¡± develop and/or etch. Full-Engineering Plastics only, high quality seamless fabrication. ¼¼ÀÌÇÁƼ ·Ï ÀåÂø. N2 ÆÛÁöÆ÷Æ® ÀåÂø :Syringe Holder & Diffuser for N2 ¿ÜºÎ °üÂû °¡´ÉÇÑ °È Glass coverÀåÂø :
depending on substrate size and chuck type |
Benefits
Where the application requires PTFE, we use TFM1600 material, superior for use with chemicals above standard PTFE, with a much higher material surface density than standard PTFE,
thus significantly lower ¡°Memory Capability¡± for absorbing contamination from Chemicals.
Liners are available in PET (Polyethylenterephthalat), 0.5mm thick, transparent, antistatic (108 - 1010 ¥Ø) to prevent possible build-up of static charge in the chamber.
Specifications | SPIN150i | SPIN200i |
---|---|---|
ÇÁ·Î±×·¥¼ö: ½ºÅÜ: ȸÀü¼ö: Á¤¹Ðµµ: ȸÀü¹æÇâ: |
Unlimited Unlimited 0-12,000 rpm +/-1rpm steps ¡¾ 0.1 rpm Á¤È¸Àü,¿ªÈ¸Àü , Puddle |
Unlimited Unlimited 0-12,000 rpm +/-1rpm steps ¡¾ 0.1 rpm Á¤È¸Àü,¿ªÈ¸Àü , Puddle |
ÃÖ´ë °¡¼Óµµ:Ramp up down°¡´É ½Ã°£ ¼³Á¤ |
30,000 rpm/sec Unlimited , ¡¾ 0.1 seconds steps |
30,000 rpm/sec Unlimited, ¡¾ 0.1 seconds steps |
Free programmable outputs: |
3 pcs, relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC |
3 pcs, relays, nominal switching capacity 0,5 A /125 VAC - 0.3A / 60VDC |
½Ã½ºÅÛ º»Ã¼ ÀçÁú: è¹ö ÀçÁúl: |
Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
Interface: External connection: |
Detachable, full-size
touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller |
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller |
ÃÖ´ë½Ã·á »çÀÌÁî
:
Max. process chamber diameter: |
160mm round or 4ÀÎÄ¡ x 4ÀÎÄ¡ square |
260 mm round or 6ÀÎÄ¡ x 6ÀÎÄ¡ square |
Dimension (desktop version): Shipping weight: Shipping dimension: Requirements Voltage: Power consumption: Max. current: Vacuum: Motor purge gas: Drain connection: |
202 mm 274 (w) x 250 (h) x 451 (d) mm 14 kgs 600 x 380 x 360 mm 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) Max. 500 W 5A / 2,5A -65 kPa (-19 inchHg), > 80 lpm Tube OD ¨ª8mm 20 - 50 kPa, 2-5 l/min, Tube OD ¨ª 6mm 1¡± M-NPT |
302 mm 380 (w) x 307 (h) x 559 (d) mm 20 kgs 680 x 580 x 480 mm 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) Max. 500 W 5A / 2,5A -65 kPa (-19 inchHg), > 80 lpm Tube OD ¨ª8mm 20 - 50 kPa, 2-5 l/min, Tube OD ¨ª 6mm 1¡± M-NPT |
Measured without substrate, limitations may apply depending on chuck used and substrate specification
For our spin processors and chucks we use NPP-H with ¥á-crystalline properties..
300mm | |
---|---|
Polos Advanced series´Â µð½ºÆæ½Ì ÀåÄ¡¸¦ Ãß°¡ Çϴµ¥ Á»´õ Æí¸®ÇÕ´Ï´Ù. |
Automatic Sequential or Parallel Chemical Dispense Up to 6 spray nozzles Each programmable independently Dispense Vessel (DV), DI Water or N2 |
Specifications | POLOS 200 Advanced ½ºÇÉÄÚÅÍ | POLOS 300 Advanced ½ºÇÉÄÚÅÍ |
---|---|---|
ÇÁ·Î±×·¥¼ö: ½ºÅÜ: ȸÀü¼ö: Á¤¹Ðµµ: ȸÀü¹æÇâ: ÃÖ´ë °¡¼Óµµ:Ramp up down°¡´É ½Ã°£ ¼³Á¤ |
Unlimited Unlimited 1 - 12,000 rpm ¡¾ 1rpm steps ¡¾ 0.1 rpm Clockwise, Counter clockwise and Puddle 30,000 rpm/sec unlimited |
Unlimited Unlimited 1 - 12,000 rpm ¡¾ 1rpm steps ¡¾ 0.1 rpm Clockwise, Counter clockwise and Puddle 30,000 rpm/sec unlimited |
Free programmable outputs: |
3 dry relays as standard Up to 16 digital input, 16 digital output, 4 analog input, 4 analog output (with optional IO modules) |
3 dry relays as standard Up to 16 digital input, 16 digital output, 4 analog input, 4 analog output (with optional IO modules) |
½Ã½ºÅÛ º»Ã¼ ÀçÁú: è¹ö ÀçÁúl: |
Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) |
Interface: External connection: |
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller |
Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller |
ÃÖ´ë½Ã·á »çÀÌÁî
: Max. process chamber diameter: |
260mm round or 6ÀÎÄ¡ x 6ÀÎÄ¡ square
|
360mm round or 8ÀÎÄ¡ x 8ÀÎÄ¡ square
|
Dimension (desktop version): |
302 mm 380 (w) x 307 (h) x 599 (d) mm |
402 mm 430 (w) x 310 (h) x 650 (d) mm |
Shipping weight: Shipping dimension: |
20 kgs 680 x 580 x 480 mm |
32 kgs 780 (w) x 620 (h) x 580 (d) mm |
Requirements Voltage: Power consumption: Max. current: Vacuum: Motor purge gas: Drain connection: |
100 - 120 VAC / 200 - 240 VAC |
100 - 120 VAC / 200 - 240 VAC |
Specifications | POLOS 450 Advanced ½ºÇÉÄÚÅÍ |
---|---|
ÇÁ·Î±×·¥¼ö: ½ºÅÜ: ȸÀü¼ö: Á¤¹Ðµµ: ȸÀü¹æÇâ: ÃÖ´ë °¡¼Óµµ:Ramp up down°¡´É ½Ã°£ ¼³Á¤ Free programmable outputs: ½Ã½ºÅÛ º»Ã¼ ÀçÁú: è¹ö ÀçÁúl: Interface: External connection: ÃÖ´ë½Ã·á »çÀÌÁî : Max. process chamber diameter: Dimension (desktop version): Shipping weight: Shipping dimension: Requirements Voltage: Power consumption: Max. current: Vacuum: Motor purge gas: Drain connection: |
Unlimited Unlimited 0-1,500 rpm ¡¾ 1rpm steps ¡¾ 0.1 rpm Clockwise, Counter clockwise and Puddle <1500 rpm/s depends on the load unlimited 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller 460 round and 350x350mm square substrates 502 mm 795 (w) x 638 (h) x 922 (d) mm 75 kgs 800 x 790 x 1180 mm 200 - 240 VAC 50/60 Hz Peak 1000W 10A -80 kPa (-24 inchHg), > 80 lpm. Tube OD ¨ª 8mm 20 - 50 kPa. Tube OD ¨ª 6mm 500lph 1,5¡± M-NPT |
Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.
Measured without substrate, limitations may apply depending on chuck used and substrate specification.
EBR (Edge Bead Removal) Auto Dispense Lines Full PTFE Dispense Vessel Automated injector line |
MegPie BSR (Back Side Rinse) The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. |
---|---|
Static Barrier Plate High Pressure Jet | Corrugated Drainhose, Drain tank andVacuum Pump connector In NPP, including connection to The vacuum pump is very quite and reliable.connect to the drainport. |
POLOS 1000 NPP POLOS 600 NPP ÃÖ´ë½Ã·á»çÀÌÁî :642 mm dia |
|
---|---|
unloading of 430x430mm substrate | |
- PP or PTFE (solvent safe) chucks°ø±Þ °¡´É ÃÖ´ë 300mm.
better film uniformity during coating.
Chucks are available in following materials: PP, PTFE
. ôÁ¦ÀÛÀº »ó´ã¿ä¸Á
재성ITS co. Tel:031-479-4211/2 Fax:031-479-4213
jsi@jsits.com
안양시 동안구 호계동 555-9 국제유통상가,17동 127호